Dr. Manivannan  Ramachandran

Department Chemical Engineering
Designation Assistant Professor
Educational Qualification Ph.D (IITM), Post Doctorate (Clarkson University, NY,USA & Hanyang University, South Korea)
E-Mail rmani.che@nitrr.ac.in / manichem@gmail.com
Contact Number 07712254200
Areas of Interest
    Microelectronic Fabrication (CMP, Post-CMP Cleaning Using Megasonics)
    Nanotechnology
    Electrochemistry
Publications

SCI / SCIE Journal Publications

  1. R. Sani, R. Manivannan, S. N. Victoria, One step electrochemical deposition of CZTS for solar cell applications, Chalcogenide Letters (2017) Accepted.
  2. K. Sumithra, K. Yadav, R. Manivannan, S. N. Victoria, Electrochemical Investigation of Corrosion Inhibition Mechanism of Tectona grandis Leaf Extract for SS304 Stainless Steel in Hydrochloric Acid, Corrosion Reviews (2017) Accepted.
  3. A. Gupta, S. N. Victoria, R. Manivannan, Investigation of chemical tooth mechanism in chemical mechanical planarization of germanium, Tribology International 112 (2017) 42–46.
  4. Reshma R. Nair, A. Gupta, S. Noyel Victoria, R. Manivannan, Chemical Mechanical Planarization of Germanium using Oxone® based Silica Slurries, Wear (2016) Accepted.
  5. A. Gupta, Y. N. Lakshmi, R. Manivannan, S. N. Victoria, Visible range photocatalysts for solid phase photocatalytic degradation of polyethylene and polyvinyl chloride, J. Chil. Chem. Soc. (2016) Accepted.
  6. B. S. Swaroop, S. Noyel Victoria, R. Manivannan, Azadirachta indica leaves by Arthrobacter sulfureus in neutral pH conditions - A remedy to blue green water problem, J. Taiwan Inst. Chem. Eng. 64 (2016) 269-278.
  7. Alok Singh, R. Manivannan, S. Noyel Victoria, Simple one-pot sonochemical synthesis of copper sulphide nanoparticles for solar cell applications, Arabian Journal of Chemistry (2015) Accepted.
  8. S. Noyel Victoria, Rohith Prasad, R. Manivannan, Psidium guajava leaf extract as green corrosion inhibitor for mild steel in phosphoric acid, Int. J. Electrochem. Sci., 10 (2015) 2220-2238.
  9. R. Manivannan, B.-J. Cho, X. Hailin, S. Ramanathan, J.-G. Park, Characterization of non-amine based post-copper chemical mechanical planarization cleaning solution, Microelectron. Eng., 122 (2014) 33-39.
  10. T.-Y. Kwon, B.-J. Cho, R. P. Venkatesh, M. Ramachandran, H.-M. Kim, C.-K. Hong and J.-G. Park, Effect of oxide hardness on scratches in interlevel dielectric chemical mechanical polishing, Tribology Transactions 57(2) 2014 pp. 190-197 .
  11. B.V.S. Praveen, R. Manivannan, T.D. Umashankar, B.-J. Cho, J.-G. Park, S. Ramanathan, Abrasive and additive interactions in high selectivity STI CMP slurries, Microelectron. Eng. 114(2014) 98-104.
  12. T.Y. Kwon, M. Ramachandran, B.-J. Cho, A. A. Busnaina and J.-G. Park, The impact of diamond conditioners on scratch formation during chemical mechanical planarization of silicon dioxide, Tribol. Int., 67 (2013) 272-277.
  13. M.S. Kim, B.K. Kang, M. Ramachandran, J.K. Kim, B.K. Lee and J.G. Park, Removal of UV cured resin using hybrid cleaning process for nanoimprint lithography, Microelectron. Eng.114 (2014) 126-130.
  14. T.Y. Kwon, B.J. Cho, M. Ramachandran, A. A. Busnaina and J.G. Park, Investigation of source-based scratch formation during oxide chemical mechanical planarization, Tribol. Lett. 50 (2013) 169-175.
  15. M. Ramachandran, B.J. Cho, T.Y. Kwon and J.G. Park, Hybrid cleaning technology for enhanced Post-Cu/low-dielectric constant chemical mechanical planarization cleaning performance, Jpn. J. Appl. Phys. 52 (2013) 05FC02-01-06.
  16. B.J. Cho, H.M. Kim, R Manivannan, D.J. Moon and J.G. Park, On the mechanism of material removal by fixed abrasive lapping of various glass substrates, Wear 302 (2013) 1334-1339.
  17. H.M. Kim, R Manivannan, D.J. Moon, H. Xiong and J.G. Park, Evaluation of double sided lapping using a fixed abrasive pad for sapphire substrates, Wear 302 (2013) 1340-1344.
  18. R. Manivannan, S. N. Victoria and S. Ramanathan, Mechanism of high selectivity in ceria based shallow trench isolation chemical mechanical polishing slurries, Thin Solid Films 518 (2010) 5737-5740.
  19. R. Manivannan and S. Ramanathan, The effect of hydrogen peroxide on polishing removal rate in CMP with various abrasives, Appl. Surf. Sci. 255 (2009) 3764-3768.
  20. R. Manivannan and S. Ramanathan, Role of abrasives in high selectivity STI CMP slurries, Microelectron. Eng. 85 (2008) 1748-1753.

Review Paper

  1. T.-Y. Kwon, M. Ramachandran, J.-G. Park, Scratch formation and its mechanism in chemical mechanical planarization, Friction 1(4) 2013 pp.279-305 .

Patents

  • B.V.S. Praveen, R. Manivannan, T.D. Umashankar, Byoung-Jun Cho, Jin-Goo Park and S. Ramanathan, Lanthanum doping of ceria abrasive to obtain robust CMP polish rates, Indian Patent Application No. 4103/CHE/2013 dt. 12/09/2013.

Non-SCI Journal Publications

  1. Ankur Pandey and R. Manivannan, A study on synthesis of nickel nanoparticles using chemical reduction technique, Recent Patents on Nanomedicine, (2015) Accepted. 
  2. Ankur Pandey and R. Manivannan, Chemical reduction technique for the synthesis of nickel nanoparticles, Int. Journal of Engineering Research and Applications, 5(4), (2015) 96-100.
  3. R. Manivannan and S. Ramanathan, Effect of additives in chemical mechanical planarization for shallow trench isolation, Int. J. Chem. Sci. 5(4), (2007) 1643-1651.

International Conferences

  1. Reshma R. Nair, A. Gupta, S. Noyel Victoria, R. Manivannan, \"Chemical mechanical planarization of germanium using oxone based silica slurries\", 21st International Conference on Wear of Materials, Hilton Long Beach, CA, USA, 26th-30th March 2017.
  2. K. Yadav, J. Bisen, S. N. Victoria, R. Manivannan, \"Ruthenium chemical mechanical planarization using sodium hypochlorite as oxidizer in silica based slurries\", 21st International Conference on Wear of Materials, Hilton Long Beach, CA, USA, 26th-30th March 2017.
  3. S. Dharmadhikari, P. Ghosh, R. Manivannan, \"Synthesis of proton exchange membranes using different polymeric systems for a dual chambered microbial fuel cell\", International Conference on Membrane Technology and its application on Separation MEMSEP 2017, NIT Trichy, February 21st - 23rd, 2017.
  4. Kavita Yadav, Jitendra Bisen, S. Noyel Victoria, R. Manivannan, \"Ruthenium Chemical Mechanical Planarization Using Sodium hypochlorite as oxidizer in silica based slurries\", CHEMCON 2016, Chennai, December 27th-30th 2016.
  5. S. Dharmadhikari, P. Ghosh, R. Manivannan, \"Characterization and Application of Synthesized Proton Exchange Membranes in Microbial Fuel Cell\" CHEMCON 2016, Chennai, December 27th-30th, 2016.
  6. Chaitra S, A Gupta, R. Manivannan, S. Noyel Victoria, \"Inhibitory action of Ocimum sanctum against sulfur reducing bacteria induced corrosion in mild steel\", CHEMCON 2016, Chennai, December 27th-30th 2016.
  7. Rabiya S, Manivannan R, S. Noyel Victoria, \"One step electrochemical deposition of CZTS for solar cell applications\", CHEMCON 2016, Chennai, December 27th - 30th 2016. 
  8. Dhananjay Sahu, Noyel Victoria S, Manivannan R, \"One pot ultrasound assisted synthesis of CZTS nanoparticles for solar cell applications\", CHEMCON 2016, Chennai, December 27th - 30th 2016.
  9. Reshma Nair, Apeksha Gupta, S. Noyel Victoria and R. Manivannan, “Chemical Mechanical Planarization of Germanium using fumed silica and Potassium peroxymonosulfate\", ICMST 2016: International Conference on Material Science and Technology, Kerala, June 5th to 8th ,2016.
  10. Kavita Yadav, Jitendra Bisen, S.N. Victoria and R. Manivannan, “Ruthenium Chemical Mechanical Planarization using Sodium Hypochlorite as oxidizer in a Titania based Slurry”, ICMST 2016: International Conference on Material Science and Technology, Kerala, June 5th to 8th ,2016.
  11. Ankur Pandey, Kavita Yadav and R. Manivannan, “Solar Energy Assisted Synthesis of Nickel Nanoparticles”, CHEMCON 2015, IIT Guwahati, December 27th-30th ,2015.
  12. Laxmi. Y. N, Apeksha Gupta,  S. Noyel Victoria and R. Manivannan, “Photo-Catalytic degradation of Plastics”, CHEMCON 2015, IIT Guwahati, December 27th-30th ,2015.
  13. Apeksha Gupta, Reshma Nair, S. Noyel Victoria and R. Manivannan, “Chemo-Mechanical Planarization of Germanium using Titania and Hydrogen peroxide”, ICONTES 2016:International Congress on Technology, Engineering and Science 2016, Malaysia, 13th to 14th Feb, 2016
  14. Jitendra Bisen, Kavita Yadav, S.N. Victoria and R. Manivannan, “Chemical Mechanical Planarization of Ruthenium using fumed silica and NaOCl”, ICMTech  2016:International Conference on Materials Science & Technology, University of Delhi, March 1st to 4th, 2016
  15. Reshma Nair, Apeksha Gupta, S. Noyel Victoria and R. Manivannan, “Chemical Mechanical Planarization of Germanium using fumed silica and H2O2, ICMTech 2016:International Conference on Materials Science & Technology, University of Delhi, March 1st to 4th, 2016.
  16. Kavita Yadav, Apeksha Gupta and R. Manivannan, \"Glycine as a corrosion inhibitor for mild steel in nitric acid\", International Conference on New Frontiers in Chemical, Energy and Environmental Engineering (INCEEE-2015), NIT Warangal, March 20-21, 2015 (Proceedings Page No. 13 & 14, ISBN 978-81-928314-1-1).
  17. Apeksha Gupta, Dushyant Patel, Sunil Meena and R. Manivannan, \"Adsorption of hexavalent chromium on activated rice husk carbon\", International Conference on New Frontiers in Chemical, Energy and Environmental Engineering (INCEEE-2015), NIT Warangal, March 20-21, 2015 (Proceedings Page No. 385 & 386, ISBN 978-81-928314-1-1).
  18. Zeenat Arif, A. B. Soni and R. ManivannanSynthesis and Characterization of Oleic Acid Capped Metallic Copper Nanoparticle via Chemical Reduction Technique” 2nd International Conference on Nanotechnology (ICNT-2015), Haldia, Feb 19-22, 2015 (Proceedings Page No. 220-226, ISBN : 978-81-927756-2-3).
  19. Ankur Pandey and R. ManivannanSynthesis of Nickel Nanoparticles using Chemical Reduction Technique” 2nd International Conference on Nanotechnology (ICNT-2015), Haldia, Feb 19-22, 2015 (Proceedings Page No. 242-246, ISBN : 978-81-927756-2-3).
  20. R. Manivannan, B.-J. Cho, T.-Y. Kwon and J.-G. Park, “Hybrid Cleaning Technology for Enhanced Post-Cu/low-k CMP Cleaning Performance” ADMETAPlus 2012 : Asian Session in Japan, 100-101.
  21. T.-Y. Kwon, R. Manivannan, B.-J. Cho, A. A. Busnaina and J.-G. Park, “The Impact of Diamond Conditioners on Scratch Formation during Silicon-dioxide CMP” ADMETAPlus 2012 : Asian Session in Japan, 16-17.
  22. H.-M. Kim, R. Manivannan, D.-J. Moon, T.-Y. Kwon, J.-H. Noh and J.-G. Park, “Evaluation of Glass Lapping Using Fixed Abrasive Pad”, ICPT Proceedings in France (2012) pp. 409-414.
  23. J.-G. Park, B.-K. Kang and R. Manivannan, “Challenges in 1x Design Node Semiconductor Device Cleaning”, ICFD 2012, Sendai, Japan, 374-375.
  24. U. S. Ansar, R. Manivannan, K. Rushing, C. Wang, Y. Li, E. Su, S. Venkataraman and Y. Li “CeO2 & SiO2 Slurries for FEOL Applications”, Lake Placid Meeting, USA (2011).
  25. S. Ramanathan, R. Manivannan and V. Vineeth, “High selectivity slurries for STI CMP”,ECS Meeting, Las Vegas, USA, ECS Trans. 33(10) (2010) 31-42.
  26. R. Manivannan and S. Ramanathan \"Role of DL-Aspartic Acid in STI CMP Slurries\", ICPT Proceedings in Japan (2009) 47-51.

National Conferences

  1. Ankita Verma, Ankur Pandey and R. Manivannan, \"Corrosion inhibition of mild steel in nitric acid using glycine (gly) as green corrosion inhibitor, CHEMCON-2014, Chandigarh, Dec, 27-30,2014.
  2. Apeksha Gupta and R. Manivannan \"Removal of nanoparticles from Cu/low-k surfaces using hybrid cleaning technology\", National Conference on Nanoscience and Nanotechnology 2014, Bhilai (Review Poster) - Best Poster Presentation Award to Ms. Apeksha Gupta.
  3. Ankur Pandey and R. Manivannan \"A study on synthesis of nickel nanoparticles using chemical reduction technique\", National Conference on Nanoscience and Nanotechnology 2014, Bhilai - Best Oral Presentation Award (2nd Prize) to Mr. Ankur Pandey.
  4. Zeenat Arif, A. B. Soni and R. Manivannan \"Synthesis and characterization of copper nanoparticles using chemical reduction technique\", National Conference on Nanoscience and Nanotechnology 2014, Bhilai.
  5. Kavita Yadav and R. Manivannan \"Murraya koenigii as a green corrosion inhibitor for mild steel in nitric acid medium\", SCHEMCON-2014, Haldia.
  6. R. Manivannan and S. Ramanathan \"Effect of additives in chemical mechanical planarization for shallow trench isolation\", NCFCE-2007 Proceedings, IIT Guwahati.
  7. C.P.Krishnamoorthy, R.Manivannan, Abhijit P.Deshpande and S. Pushpavanam “Experimental Study of Surfactant Flushing of Non-Aqueous Phase Liquids in Porous Media” CHEMCON, New Delhi (2005).

 Citations Details : Google Scholar & Researcher ID : D-9329-2015

Other Info.
Sponsored Projects

Sl. No.

Project Title

Sponsoring Agency

Value

(in INR)

Time Period

1.

Slurry Formulation for Ruthenium Chemical Mechanical Planarization

DST-SERB

26,35,593

2014-2017

(ongoing)

2.

Interactive mechanism of green corrosion inhibitor and mild steel in alkaline medium containing chloride ion

CGCOST

4,28,000

2015-2017

(ongoing)

3. Effect of additives on germanium chemical mechanical planarization slurries IEI

1,50,000

2016-2018

(ongoing)

Courses Taught
  • Chemical Process Modelling & Simulation (UG & PG)
  • Heat Transfer Operations (UG)
  • Material Technology (UG)
  • Process Instrumentation and Measurement (UG)
  • Advanced Process Dynamics & Control (PG)

Laboratory Faculty In-Charge

  • Process Dynamics and Control Laboratory
  • Simulation Laboratory

Administrative Responsibilities

  • Department TEQIP Co-ordinator (Since Nov. 2013)
  • Department Building Committee Member (Since Dec. 2013)
  • Department Research Committee Member (Since May 2014)
Work Experience (Teaching / Research / Industrial)
  • Assistant Professor NIT Raipur, Chhattisgarh, India 
  • Post Doctorate Hanyang University, Ansan, South Korea (Advisor : Prof. Jin-Goo Park)  
  • Research Associate Clarkson University, NY, USA (Advisor : Prof. Yuzhuo Li) 
  • Senior Officer, WQA MWSC, Maldives 
  • Project Associate, IIT Madras

Training Programme Attended

  1. Gas Chromatography Analysis, Advanced Training Institute, Chennai.
  2. Faculty Induction Training Phase-I (Under TEQIP II), NITTTR Bhopal, 2nd - 13th June, 2014.

Workshop Attended

  1. \"Workshop on Academic Ethics and IPR\" Organized by NIT Raipur, CGCOST, 4th & 5th April, 2014.
  2. \"Workshop on Advanced Characterization Techniques\" Organized by IIT Bombay, 12th May 2014.
  3. \"Workshop on Collection Development of E-Books in Libraries\" Organized by NIT Raipur, 14th & 15th Nov. 2014.
  4. \"Workshop on Recent Challenges in Atmospheric and Earth Sciences\" Organized by NIT Surathkal, 27th - 30th Dec. 2014.

Workshop Organized

    1. \"Renewable Energy & Environment (REE-14)\" Dept. of Chemical Engineering, NIT Raipur,12th & 13th June, 2014 (Under TEQIP Phase-II)Co-ordinators : Mr. Dharm Pal & Dr. R. Manivannan.

Short Term Course Organized (Self Sponsored)

1. \"Chemical Process Modelling Simulation (CPMS-14)\" Department of Chemical Engineering, NIT Raipur, 23rd - 27th, June, 2014. Co-ordinators : Dr. P. K. Chaudhari & Dr. R. Manivannan.

SERB School Attended 

1. \"Fundamental Electrochemical Principles Applied to Problems in Science and Engineering\" Department of Chemical Engineering, IIT Madras, 10th - 14th Aug, 2014. 

 

Invited Talk

1. \"Nanoparticles - Boon or Bane in Microelectronic Industry\", in Recent Research Methodologies and Instrumentation Techniques on chemical and Bio-medical Engineering\" held on 15th - 19th Dec. 2014, Organized by NIT Raipur.


Short-Term Training Programme Attended

  1. \"Short Term Training Programme on MATLAB Programming and Its Engineering Applications\" Organized by NIT Raipur, 26th-30th Dec. 2013.
  2. \"Short Term Course on Thermodynamic Analysis of Modern Separation Processes\" Organized by IIT Madras, 23rd - 29th Nov. 2014.

Membership of Professional Society

  1. Associate Member of IEI, Membership No. AM150977-5.
  2. Life Member of IIChe, Membership No. LM-53331.
  3. Life Member of ISTE, Membership No. LM-102348.

Reviewer of Journals

  1. Journal of the Taiwan Institute of Chemical Engineers
  2. International Journal of Advanced Manufacturing Technology.
  3. Journal of Nanotechnology
  4. Journal of Scientific & Industrial Research
Awards & Scholarship
  • Outstanding Contribution in Reviewing from Elsevier - Journal of the Taiwan Institute of Chemical Engineers.
  • Young Scientist Award (Semiconductor Chip Fabrication) 
  • BRAIN KOREA 21 Scholarship in South Korea.
  • Received an INVENTION AWARD for the invention of “Treatment of Ceria Slurry with Hydrogen Peroxide and Reuse” (2011)
  • MHRD scholarship for my Ph.D programme.
  • IITM Travel Grant for presenting the paper in overseas conference.
  • Received a GOLD MEDAL for getting University Rank XIV from Adhiparasakthi Institution.
  • Received a SILVER MEDAL for best academic performance in Engg for the period from 1999 – 2003 from Adhiparasakthi Educational Institution.

Research Group

 

Programme

Name of the Student

Research Area

Guidance

Status

Ph.D

Mrs. Apeksha Gupta

Germanium CMP

Sole

Ongoing

Ms. Kavita Yadav

Ruthenium CMP

Jointly with Dr. S. Noyel Victoria

Ongoing

Mr. Sandeep Dharmadhikari

Membrane Synthesis

Jointly with

Dr. Prabir Ghosh

Ongoing

M.Tech

Ms. Reshma Nair

Germanium CMP

Sole

Completed (June 2016)

Mr. Jitendra Bisen

Ruthenium CMP

Jointly with Dr. S. Noyel Victoria

Completed

(June 2016)

Ms. Zeenat Arif

Copper Nanoparticles

Jointly with Dr. (Mrs.) A.B. Soni

Completed (June 2015)

Mr. Ankur Pandey

Nickel Nanoparticles

Sole

Completed (June 2015)

Ms. Kavita Yadav

Green corrosion inhibitor for mild steel

Sole

Completed (June 2014)